Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2007-06-29
2010-06-08
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
With measuring or testing
C257SE21521, C378S070000, C436S178000, C134S001300
Reexamination Certificate
active
07732225
ABSTRACT:
A method of manufacturing a semiconductor device includes placing a sample of a liquid chemical containing a contaminant on a substantially impurity-free surface of a substrate. The liquid chemical is evaporated, leaving the contaminant on the surface. The contaminant is concentrated in a scanning solution, which is then evaporated to form a residue. A concentration of the contaminant in the residue is determined.
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Douglas Monte Allan
Hanson Jeffrey Allen
Loewenstein Lee M.
Brady III Wade J.
Coleman W. David
Patti John J.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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