Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2007-02-09
2010-06-08
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S310000, C250S311000, C703S002000, C703S006000, C703S013000
Reexamination Certificate
active
07732761
ABSTRACT:
To provide a consistent, high-speed, high-precision measurement method based on an electron beam simulation by reflecting the apparatus characteristics of a CD-SEM in an electron beam simulation, the present invention discloses a method for measuring a measurement target pattern with a CD-SEM, the method comprising the steps of performing an electron beam simulation on various target pattern shapes, which is reflected apparatus characteristic and image acquisition conditions; creating SEM simulated waveforms; storing a combination of the created SEM simulated waveforms and pattern shape information corresponding to the created SEM simulated waveforms as a library; comparing an acquired actual electron microscope image with the SEM simulated waveforms; selecting the SEM simulated waveform that is most similar to the actual electron microscope image; and estimating the shape of the measurement target pattern from the pattern shape information corresponding to the selected SEM simulated waveform.
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Shishido Chie
Tanaka Maki
Antonelli, Terry Stout & Kraus, LLP.
Berman Jack I
Hitachi High-Technologies Corporation
Purinton Brooke
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