Method for manufacturing unsupported metal lattice structures

Details Method for manufacturing unsupported metal lattice structures Method for manufacturing unsupported metal lattice structures

1983-01-04

1984-05-08

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156652, 156656, 1566591, 1566611, 204 15, 430317, 430318, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

044472927

ABSTRACT:
A method for manufacturing unsupported metal lattice structures, such as nickel lattices for use as micro-flow sensors in gas analysis devices, employs the steps of two-sided vacuum metallization on a substrate, several photoresist steps, an electroplating step, and an etching step. A number of units can be produced by this method on a single substrate.

REFERENCES:
patent: 4058432 (1977-11-01), Schuster-Woldan et al.
patent: 4164059 (1979-08-01), Van Esdonk
patent: 4240869 (1980-12-01), Diepers
patent: 4341591 (1982-07-01), Tamutus

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