Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-09-25
2007-09-25
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S158000, C438S508000, C257SE21224, C257SE21409
Reexamination Certificate
active
10867811
ABSTRACT:
The present invention relates to a method of manufacturing a thin film transistor array panel and apparatus and more particularly to an apparatus containing an in-situ fluorine generation chamber.
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Chang Won-Kie
Choi Dong-Uk
Kim You-Keun
Lee Jin-Wook
Song Won
Geyer Scott B.
Isaac Stanetta
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