Method for manufacturing thin film transistor

Details Method for manufacturing thin film transistor Method for manufacturing thin film transistor

2007-11-09

2011-12-27

Sarkar, Asok (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C257SE21051, C257SE21370, C257SE21400, C257SE21654, C438S609000

Reexamination Certificate

active

08084307

ABSTRACT:
A method for manufacturing a thin film transistor containing an channel layer11having indium oxide, including forming an indium oxide film as an channel layer and subjecting the formed indium oxide film to an annealing in an oxidizing atmosphere.

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