Method for manufacturing TFT LCD device

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C430S319000, C430S396000, C430S318000, C438S030000

Reexamination Certificate

active

06335148

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a thin film transistor (TFT) liquid crystal display (LCD) device and more particularly, to a TFT LCD device having a pixel electrode and a counter electrode so configured that an electric field having a horizontal component parallel to the surface of a back substrate is generated in a liquid crystal cell.
2. Description of the Related Art
In general, a TFT LCD device comprises a plurality of unit pixels and thin film transistors respectively corresponding to the unit pixels. Due to such a construction, it can realize a fast responding property, a high picture quality comparable to cathode ray tubes (CRTs), and an enlargement in scale of screen.
At an early stage of the development of such TFT LCD devices, a TN (Twisted Nematic) mode or STN (Super Twisted Nematic) mode has been proposed, in which an electric field perpendicular to the surface of a back substrate is applied to liquid crystal cells. However, TN or STN mode LCD devices have a drawback of a poor viewing angle property. In order to overcome this drawback, an in plane switching (IPS) mode LCD device has been proposed.
In this IPS mode liquid crystal display device, an electric field parallel to the surface of the back substrate is applied to liquid crystal cells. In order to generate such a parallel electric field, a pixel electrode and a counter electrode are arranged in parallel to each other on the back substrate. In this IPS mode LCD device, a viewing angle property can be improved. However, the in plane switching mode LCD device, in which the pixel electrodes and counter electrodes are made of an opaque conductive material, exhibits a low aperture ratio and a degraded transmittance. In order to solve this problem, a fringe field switching mode LCD device has also been proposed (Korean Patent Application No. 98-9243).
The above-mentioned fringe field mode LCD device is illustrated in FIG.
1
.
FIG. 1
is a plan view illustrating a conventional fringe field mode LCD device manufactured according to the conventional method.
As shown in
FIG. 1
, in the fringe field mode LCD device a plurality of unit pixels are defined by gate bus lines
2
and data bus lines
4
which are arranged in a matrix form on a back substrate
1
. Further, a thin film transistor is disposed in the vicinity of an intersection where one gate bus line
2
and one data bus line
4
cross each other.
In each unit pixel, a counter electrode
5
is formed in the shape of a rectangular plate. The counter electrode
5
is made of a transparent conductive material and is connected to storage capacitor line
7
so as to receive common signals continuously. The storage capacitor line
7
has a first storage capacitor
7
a
extending in parallel to the gate bus line
2
, and a second storage capacitor
7
b
extending from the first storage capacitor
7
a
in parallel to the data bus line
4
so that it may be interposed between the counter electrode
5
and the data bus line
4
. The first storage capacitor
7
a
is electrically in contact with the counter electrode
5
whereas the second storage capacitor
7
b
is electrically insulated from the data bus line
4
.
Also in each unit pixel, a pixel electrode
9
is also provided, which is made of a transparent conductive material. The pixel electrode
9
overlaps partially with the counter electrode
5
, and is insulated from the counter electrode
5
by a gate insulating film (not shown). The pixel electrode
9
has a plurality of comb-shaped electrode portions
9
a
, and an electrode bar
9
b
for connecting respective end of the comb-shaped electrode portions
9
a
together. The comb-shaped electrode portions
9
a
are uniformly spaced from one another.
The electrode bar
9
b
is in contact with a drain electrode of the thin film transistor.
Since both the pixel electrode
5
and the counter electrode
9
are made of a transparent conductive material, high aperture ratio can be realized.
Meanwhile, although not shown, a front substrate is disposed opposite to the back substrate
1
. The spacing between the front substrate and back substrate
1
is greater than the spacing between the counter electrode
5
and the pixel electrode
9
.
Now, the operation of the fringe field mode LCD device having the above construction will be described.
When a voltage is exerted between the counter electrode
5
and the pixel electrode
9
, a fringe field is produced in the liquid cell. Here, since the spacing between the front substrate and back substrate
1
is set to be greater than the spacing between the counter electrode
5
and the pixel electrode
9
, a fringe field having a vertical component is generated over the entire upper surface of two electrodes, that is, the counter electrode
5
and the pixel electrode
9
. Therefore, liquid crystal molecules over the two electrodes are activated. Thus, a high transmittance is achieved.
A conventional method for manufacturing the fringe field mode LCD device operating as above will be described referring to FIG.
2
.
FIG. 2
is a cross sectional view illustrating the conventional method for manufacturing the fringe field mode LCD device.
A transparent conductive layer is formed on a back substrate
10
, and so patterned according to a first photolithography process that a counter electrode
11
is formed.
A metal layer for a gate bus line is formed on the back substrate
10
where the counter electrode
11
has been formed. Then, though not shown, a gate bus line, a common electrode line and a gate pad are simultaneously formed by a second photolithography process. Here, the gate bus line extends in one direction. The common electrode line is in contact with the counter electrode
11
, and the gate pad is located at the edge of the back substrate
10
.
A gate insulating layer
12
, an amorphous silicon layer for a channel (not shown) and a doped semiconductor layer for an ohmic contact (not shown) are sequentially formed on the back substrate
10
where the gate bus line and the like have been formed. The doped semiconductor layer and amorphous silicon layer are so patterned according to a third photolithography process that a thin film transistor area is defined.
A metal layer for a data bus line is formed on the back substrate
10
where the thin film transistor area has defined. Then, a source electrode, a drain electrode, a data bus line and a data pad, which are not shown in the figure, are formed according to a fourth photolithography process. Here, the source electrode and the drain electrode are formed in the thin film transistor area. The data bus line is arranged to cross the gate bus line, and the data pad overlaps partially with the gate pad.
A protecting layer
13
is formed on the back substrate
10
where the source electrode and so on have been formed. Then, the protecting layer is so patterned according to the fifth photolithography process that a part of the drain electrode, the data pad and the gate pad are exposed.
Finally, a transparent conductive layer is formed so as to contact with the exposed portion of the drain electrode, the data pad and the gate pad on the protecting layer
13
. Then, according to a sixth photolithography process the transparent conductive layer is so patterned that a comb-shaped pixel electrode
14
is formed.
In
FIG. 2
, the reference number
15
represents a back orientation film disposed on the pixel electrode
14
and protecting layer
13
, the reference number
20
represents a front substrate opposite to the back substrate
10
, the reference number
21
represents a front orientation film disposed on the back surface of the front substrate
20
, the reference number
22
represents liquid crystals filled between the two substrates
10
and
20
, and the reference characters E
1
and E
2
represent fringe fields generated between the counter electrode
11
and the pixel electrode
14
, respectively.
However, each of the above 6 photolithography processes involves many sub-processes, such as a resist coating process, an exposi

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for manufacturing TFT LCD device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing TFT LCD device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing TFT LCD device will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2851485

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.