Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2006-04-18
2006-04-18
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S030000, C430S319000
Reexamination Certificate
active
07029828
ABSTRACT:
In a tester for a surface acoustic wave device used as a filter for high frequency bands in the field of mobile communications, the tester includes: an electron gun generating an electron beam to be first electrons; a condenser lens for converging the electron beam on a substrate; an electron beam scanning portion for scanning the electron beam on the substrate; a secondary electron detector detecting second electrons generating from the substrate by irradiated first electrons; a substrate holder holding the substrate; and a conductive grounding tool which can contact the metal film. The grounding tool includes a contacting head. The grounding tool includes: a contacting head that can contact the grounding tool and the metal film; an arm portion arranged at the end of the contacting head; a shaft arranged at the other end of the contacting head, and rotating the arm portion. The substrate has a two-layer structure, which includes: a circular piezo-electric substrate including lithium tantalate (LiTaO3); and a metal film including aluminum (Al) formed on the piezo-electric substrate.
REFERENCES:
patent: 5512746 (1996-04-01), Saito
patent: 11-298284 (1999-10-01), None
patent: 11-338147 (1999-12-01), None
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