Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2004-06-08
2008-11-11
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C257S759000
Reexamination Certificate
active
07449408
ABSTRACT:
It is an object of the present invention to provide a method for manufacturing a semiconductor device in which a desired region can be etched by evenly applying a solution including a resist and a method for manufacturing a semiconductor device having a laminated structure by forming an interlayer insulating layer with an organic resin.
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Arao Tatsuya
Katayama Masahiro
Muranaka Koji
Nomura Ryoji
Shichi Takeshi
Cook Alex Ltd.
Semiconductor Energy Laboratory Co,. Ltd.
Vu David
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