Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-05-17
2008-08-26
Le, Thao (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Reexamination Certificate
active
07416970
ABSTRACT:
A manufacturing method is for providing an excellent wire bonding property in the manufacturing of a semiconductor device using an organic resin wiring substrate. In the manufacturing of the semiconductor device, a thermosonic wire bonding apparatus is used when the electrodes of a semiconductor element fixed to the principal surface of a substrate are connected to lines on the substrate with wires. To connect the first and second portions to be bonded of the substrate placed on a wire bonding stage with wires each held by a capillary, the wire bonding apparatus heats the capillary to a specified temperature by irradiating the capillary with a laser beam for a given period of time immediately before first bonding for connecting the wire to the first portion to be bonded and immediately before second bonding for connecting the wire to the second portion to be bonded and heats the portions of the wires to be bonded with the resulting heat, thereby connecting the wires to predetermined portions by using thermocompression and ultrasonic vibration.
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Antonelli, Terry Stout & Kraus, LLP.
Le Thao
Renesas Technology Corp.
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