Method for manufacturing optical device

Details Method for manufacturing optical device Method for manufacturing optical device

2006-07-20

2009-10-13

Luu, Chuong A. (Department: 2892)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S048000, C438S050000, C438S052000

Reexamination Certificate

active

07601551

ABSTRACT:
A method for manufacturing an optical device having an optical block, through which a light is transmitted, is provided. The method includes steps of: forming a plurality of silicon oxide members, which is disposed on a silicon substrate, wherein the silicon oxide members are arranged in parallel each other by a predetermined clearance between two adjacent silicon oxide members; and pouring a super critical fluid into the clearance so that the clearance is filled with a product formed from a predetermined compound for forming the optical block, wherein the predetermined compound is dissolved in the super critical fluid.

REFERENCES:
patent: 6277756 (2001-08-01), Ohara et al.
patent: 6630389 (2003-10-01), Shibata et al.
patent: 6721476 (2004-04-01), Padmanabhan et al.
patent: 2003/0123827 (2003-07-01), Salerno et al.
patent: 2004/0173862 (2004-09-01), Oohara et al.
patent: 2007/0069318 (2007-03-01), Takeuchi et al.
Office Action mailed issued on Apr. 21, 2009 from the German Patent Office in the corresponding German patent application No. 10 2006 041 996.0-51 (with English translation).

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