Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1985-01-28
1986-02-11
Smith, John D.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
148 631, 427 96, 427 98, 427 99, 4271263, 430318, 430319, 430317, H05K 346
Patent
active
045699020
ABSTRACT:
A method for manufacturing a multilayer circuit substrate includes the step of providing an insulating substrate formed of an inorganic oxide and supporting a laminate formed by alternately laminating wiring layers of copper and insulating layers of an inorganic oxide. The uppermost layer of the laminate is constituted by a copper wiring layer. A layer of electrically conductive material capable of being subjected to wire bonding is formed by a low temperature deposition on the surface of the laminate. Subsequently, the conductive material layer is selectively removed by photoetching to allow the portion connected to part of the uppermost copper wiring layer to remain. In this manner, the pattern layer capable of wire bonding can be formed.
REFERENCES:
patent: 4023197 (1977-05-01), Magdo
patent: 4328048 (1982-05-01), Senda
Kaiser, "A Fabrication Technique for Multilayer Ceramic Modules", Solid State Technology, pp. 35-40, May 1972.
Smith John D.
Tokyo Shibaura Denki Kabushiki Kaisha
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