Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-03-01
2005-03-01
Siek, Vuthe (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C713S152000, C716S030000, C716S030000
Reexamination Certificate
active
06862725
ABSTRACT:
A method for manufacturing multi-kind and small-quantity semiconductor products in a mass-production line and a system thereof are provided. One aspect of the present invention, there is provided the method for manufacturing a semiconductor device through a plurality of fabrication processing steps, each of the fabrication processing steps being carried out sequentially with a plurality of chips on a wafer based on a chip identification information formed on the wafer, the method comprises at least two steps sharing the chip identification information before at least one of the two steps is carried out, wherein the steps are not immediately neighbored with each other in fabrication processing sequence.
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SEMI Wafer Map Data Draft Document; Doc. #3101 SE; Dec. 1999.
Honda Takuya
Honda Tetsurou
Iizuka Tsuneo
Takagi Osamu
Do Thuan
Fujitsu Limited
Siek Vuthe
Westerman Hattori Daniels & Adrian LLP
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