Method for manufacturing liquid crystal display

Details Method for manufacturing liquid crystal display Method for manufacturing liquid crystal display

1998-02-26

2000-06-27

Bovernick, Rodney

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

349 46, 349139, 349147, 257 59, 257 72, 257763, 438 30, G02F 1136, G02F 11343, H01L 2904, H01L 2348

Patent

active

060813083

ABSTRACT:
Since Mo or MoW layer can be deposited so as to give low stress to the substrate by adjusting the deposition pressure, a single Mo or MoW layer can be used as a wiring by itself of large scale and high resolution liquid crystal. The Mo or MoW layer has the low resistivity of less than 15 .mu..OMEGA.cm and is etched to have a smooth taper angle using an Al etchant with Al or Al alloy. Therefore, it is possible to reduce the number of photolithography processes and to prevent a battery effect and generation of a hillock.

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