Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1997-04-01
1999-12-14
McPherson, John A.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430319, 430321, 216 23, G02F 11333
Patent
active
06001539&
ABSTRACT:
A method of manufacturing an LCD on a substrate, the method comprising the steps of forming a thin film transistor on the substrate; forming an organic passivation layer over the thin film transistor; forming a patterned photoresist over the organic passivation layer; etching the organic passivation layer to form a contact hole over one of source and drain of the transistor; removing the photoresist; forming an SiO.sub.2 layer at a surface of the organic passivation layer by O.sub.2 ashing; and forming a pixel electrode contacting one of the source and drain of the transistor through the contact hole.
REFERENCES:
patent: 4636038 (1987-01-01), Kitahara et al.
patent: 5229644 (1993-07-01), Wakai et al.
patent: 5641974 (1997-06-01), den Boer et al.
M.J. Radler et al., Cyclotene.TM. Advanced Electronics Resins for High-Aperture AMLCD Applications, SID 96 Applications Digest, pp. 33-36 (1996).
D.J. Perettie et al., Benzocyclobutene as a Planarization Overcoat for Flat Panel Displays, Asia Display '95, pp. 721-724 (1995).
Koji Kishimoto, Low-dielectric-constant interlayer insulating film and its manufacturing method, Electronic Journal, pp. 33-35 (Mar. 1996).
Toshihara Ueki et al., Dye embedded BM resin and three dimensional picture element implemented by BM ON ARRAY technology for the first time, Nikkei Microdevices, pp. 60-62 (Jul. 1994).
Radler, M.J., et al., "Benzocyclobutene Dielectric Resins for Flat Panel Display Applications," Proceedings of the 3rd Annual Display Manufacturing Technology Conference, pp. 123-124, 1996 (Conference date: Feb. 6-8, 1996).
Abstract of JP 5-166976, Koya (Jul. 1993).
Abstract of JP 4-225320, Takei (Aug. 1992).
Lee Hoo-Young
Lyu Ki-Hyun
LG Electronics Inc.
McPherson John A.
LandOfFree
Method for manufacturing liquid crystal display does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for manufacturing liquid crystal display, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing liquid crystal display will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-861624