Method for manufacturing hydrogen sensors using Pd nano wire

Details Method for manufacturing hydrogen sensors using Pd nano wire Method for manufacturing hydrogen sensors using Pd nano wire

2011-01-25

2011-01-25

Culbert, Roberts (Department: 1716)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C073S023200

Reexamination Certificate

active

07875194

ABSTRACT:
Disclosed is a method for manufacturing a hydrogen sensor using Pd nano-wires. The method includes steps of forming an external electrode pattern on a substrate applying a first resin layer to the substrate and forming a resin layer nano-channel pattern; depositing Pd on the substrate having the nano-channel pattern, by sputtering, and removing the first resin layer to form Pd nano-wires; applying a second resin layer to the substrate having the Pd nano-wires, and forming a resin layer pattern on the external electrode pattern, at opposing ends of the Pd nano-wires, and at predetermined positions between the external electrode pattern and the opposing ends of the Pd nano-wires; and depositing conductive metal on the resin layer pattern and removing the resin layer pattern, thereby electrically connecting the external electrode pattern to the Pd nano-wires.

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Bangar Ma et al., “Controlled Growth of a Single Palladium Nanowire Between Micorfabricated Electordes”, Chemistry of Metals 16(24):4955-4959 Nov. 30, 2004 (Abstract).
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