Semiconductor device manufacturing: process – Making passive device
Patent
1998-03-05
2000-05-02
Whitehead, Jr., Carl
Semiconductor device manufacturing: process
Making passive device
438238, 438393, 438411, 438421, 438619, 257531, 336165, H01L 2120
Patent
active
060572027
ABSTRACT:
A method for manufacturing an inductor with resonant frequency and Q value increased in semiconductor process can reduce substrate coupling effect, because (an) air layer(s) is/are formed just under a spiral metal layer which functions as an inductor. In addition, part of the substrate material still remains around the air layer(s), which can be used as a support for the spiral metal layer. Therefore, a problem causing the above-mentioned spiral metal layer to collapse will never occur.
REFERENCES:
patent: 5461003 (1995-10-01), Havemann et al.
patent: 5760456 (1998-06-01), Grzegorek et al.
patent: 5953625 (1999-09-01), Bang
Chen Chih-Ming
Chen Kuan-Ting
Chen Tzong-Liang
Yung Hao-Chien
Davis Jamie L.
Jr. Carl Whitehead
Windbond Electronics Corp.
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