Metal working – Method of mechanical manufacture – Electrical device making
Patent
1998-03-05
2000-05-02
Young, Lee
Metal working
Method of mechanical manufacture
Electrical device making
250396ML, 250396R, 250397, 250398, 2504921, 2504922, G09F 2104
Patent
active
060557192
ABSTRACT:
The present invention relates to a charged particle beam exposure apparatus, deflecting a charged particle beam formed into a predetermined shape by being passed through a predetermined transmission mask, and irradiating a predetermined location on the surface of a sample with the charged particle beam. The apparatus comprises: a mirror barrel through which the charged particle beam is passed; and an electrostatic deflector, provided in the mirror barrel, for deflecting the charged particle beam. The electrostatic deflector has a plurality of pairs of electrodes, which are made of a conductive material having carbon as a primary element and are embedded in an internal face of an insulating cylinder. The present invention also relates to a method for forming the electrostatic deflector.
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Abe Tomohiko
Ooaeh Yoshihisa
Yasuda Hiroshi
Fujitsu Limited
Nguyen Binh-An
Young Lee
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