Method for manufacturing an array of thin film actuated mirrors

Details Method for manufacturing an array of thin film actuated mirrors Method for manufacturing an array of thin film actuated mirrors

1995-07-20

1997-03-04

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359850, 359900, 437229, G02B 2600

Patent

active

056085699

ABSTRACT:
An improved method for manufacturing an array of M.times.N thin film actuated mirrors comprises the steps of: providing an active matrix including M.times.N connecting terminals; constructing a thin film sacrificial layer on the top surface of the active matrix; removing portions of the thin film sacrificial layer surrounding each of the connecting terminals; forming a supporting member in each of the removed portions to thereby form a supporting layer; forming an elastic layer on top of the supporting layer; structuring a conduit in each of the supporting members and the elastic layer; depositing a second thin film layer on top of the elastic layer; patterning the second thin film layer into M.times.N second thin film electrodes; forming a thin film electrodisplacive layer on top of the second thin film electrodes and the elastic layer; patterning the thin film electrodisplacive layer into M.times.N thin film electrodisplacive members; patterning the elastic layer into M.times.N elastic members; depositing a first thin film layer thereon; patterning the first thin film layer into M.times.N first thin film electrodes; and removing the thin film sacrificial layer to thereby form the array of M.times.N thin film actuated mirrors.

REFERENCES:
patent: 5454906 (1995-10-01), Baker et al.
patent: 5497262 (1996-03-01), Keariyama
patent: 5526951 (1996-06-01), Bailey et al.

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