Method for manufacturing a workpiece using a magnetron...

Details Method for manufacturing a workpiece using a magnetron... Method for manufacturing a workpiece using a magnetron...

2005-03-01

2005-03-01

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298110, C204S298180, C204S192120, C204S192200

Reexamination Certificate

active

06860977

ABSTRACT:
A workpiece is manufactured using a magnetron source that has an optimized yield of sputtered-off material as well as service life of the target. Good distribution values of the layer on the workpiece are obtained that are stable over the entire target service life, and a concave sputter face in a configuration with small target-to-workpiece distance is combined with a magnet system to form the magnetron electron trap in which the outer pole of the magnetron electron trap is stationary and an eccentrically disposed inner pole with a second outer pole part is rotatable about the central source axis.

REFERENCES:
patent: 5262028 (1993-11-01), Manley
patent: 5284564 (1994-02-01), Maass
patent: 5688381 (1997-11-01), Grunenfelder
patent: 6352629 (2002-03-01), Wang
patent: 0 393 957 (1990-10-01), None

Affiliated with

Also associated with

Rating

Method for manufacturing a workpiece using a magnetron... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing a workpiece using a magnetron..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing a workpiece using a magnetron... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3385385