Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1996-08-26
1997-12-30
Bell, Janyce
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
4271262, 4271263, 427164, 4272481, 4272552, 427270, 4274192, 4274197, 427294, C03C 1500, B05D 506
Patent
active
057025690
ABSTRACT:
A method for forming an elastic member in a thin film actuated mirror, the method being capable of controlling a stress built up therein, is disclosed. The method includes the steps of: forming a thin film sacrificial layer; depositing an elastic layer on top of the thin film sacrificial layer by using a CVD method; forming an actuating structure on top of the elastic layer, the actuating structure having a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member; and removing the thin film sacrificial layer. In the present invention, the elastic layer is vertically divided into at least two portions, each of the portions being made of a same material having a different stoichiometry. The stress built up in the elastic layer is controlled by controlling the ratio of the source gases.
REFERENCES:
patent: 5552923 (1996-09-01), Min
patent: 5579179 (1996-11-01), Buom et al.
Koo Myung-Kwon
Park Myung-Hyun
Um Min-Sik
Bell Janyce
Daewoo Electronics Co. Ltd.
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