Method for manufacturing a thin film actuatable mirror array hav

Details Method for manufacturing a thin film actuatable mirror array hav Method for manufacturing a thin film actuatable mirror array hav

1997-12-03

2000-10-24

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427100, 4271033, 216 13, 216 67, 216 72, 359295, B05D 512, H05H 124, G02B 2600

Patent

active

061363901

ABSTRACT:
An inventive method for manufacturing an array of M.times.N thin film actuatable mirrors, the method being capable of preserving the structural integrity thereof, comprises the steps of: preparing an active matrix; depositing a passivation layer and an etchant stopping layer, successively, on top of the active matrix; forming a thin film sacrificial layer; depositing a first mask layer made of a silicon oxide; forming a second mask layer; forming an array of M.times.N pair of cavities, one of the cavities in each pair exposing a portion of one of the connecting terminals; removing the first and the second mask layer; forming an array of M.times.N actuating structures; removing the thin film sacrificial layer to thereby form the array of M.times.N thin film actuatable mirrors. During the formation of the cavities, the cavities is formed into a trapezoidal shape as a result of the difference in the etching rate between the first mask layer and the thin film sacrificial layer.

REFERENCES:
patent: 4213818 (1980-07-01), Lemons et al.
patent: 5247222 (1993-09-01), Engle
patent: 5481396 (1996-01-01), Ji et al.
patent: 5579179 (1996-11-01), Ji et al.
patent: 5692279 (1997-12-01), Mang et al.
patent: 5702869 (1997-12-01), Chien et al.
patent: 5757539 (1998-05-01), Min
patent: 5774256 (1998-06-01), Min et al.
patent: 5786928 (1998-07-01), Nam et al.
patent: 5789290 (1998-08-01), Sun
patent: 5874345 (1999-02-01), Coronel et al.
patent: 5877889 (1999-03-01), Um et al.
patent: 5920421 (1999-07-01), Choi
patent: 5920422 (1999-07-01), Kim

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