Method for manufacturing a structure with a useful layer held at

Details Method for manufacturing a structure with a useful layer held at Method for manufacturing a structure with a useful layer held at

1996-07-10

1998-05-12

Dutton, Brian

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

H01L 2100

Patent

active

057504202

ABSTRACT:
A method of manufacturing a structure with a useful layer (120) held at a distance from a substrate (100) by abutments (150, 151) and of detaching such a layer.
This method comprises the following steps:

REFERENCES:
patent: 4999735 (1991-03-01), Wilner
patent: 5203731 (1993-04-01), Zimmerman
patent: 5258097 (1993-11-01), Mastrangelo
patent: 5397904 (1995-03-01), Arney et al .
patent: 5616523 (1997-04-01), Benz et al.

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