Method for manufacturing a sensor array including a...

Details Method for manufacturing a sensor array including a... Method for manufacturing a sensor array including a...

2006-09-25

2010-12-28

Everhart, Caridad M (Department: 2895)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C257S418000, C257SE27006, C257SE21456, C257SE21125, C438S542000

Reexamination Certificate

active

07858424

ABSTRACT:
A method for producing a sensor array including a monolithically integrated circuit is described as well as a sensor array. This sensor array has a micromechanical sensor structure, in which a first partial structure which is associated with the sensor structure is produced at the same time as a second partial structure which is associated with the circuit, a process variation of the first partial structure being performed in order to adjust a structure property of the sensor structure while the second partial structure remains the same.

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