Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Patent
1998-02-25
2000-02-29
Bowers, Charles
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
73777, 73 1401, 7351435, 7351432, 361280, G01L 100, H01L 21461
Patent
active
060308508
ABSTRACT:
In a sensor and a method for manufacturing a sensor, a movable element is patterned out of a silicon layer and is secured to a substrate. The conducting layer is subdivided into various regions, which are electrically insulated from one another. The electrical connection between the various regions of the silicon layer is established by a conducting layer, which is arranged between a first and a second insulating layer.
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Funk Karsten
Kurle Juergen
Laermer Franz
Offenberg Michael
Schilp Andrea
Blum David S
Bowers Charles
Robert & Bosch GmbH
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