Method for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Self-aligned

Reexamination Certificate

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C438S519000, C438S542000, C438S548000

Reexamination Certificate

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07338876

ABSTRACT:
A method for forming a semiconductor memory device includes the steps of: implanting a dopant in a semiconductor substrate; heat treating the semiconductor substrate in an oxidizing ambient to diffuse the dopant for forming diffused regions in the semiconductor substrate; and forming memory cells each including a MOS transistor having the diffused regions as source/drain regions.

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