Method for manufacturing a semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

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257306, 257740, 257751, H01L 2968

Patent

active

053213068

ABSTRACT:
A method for manufacturing a semiconductor device includes forming contact holes in insulating layers to expose an impurity doped region of a semiconductor substrate. An epitaxial layer is then grown in the contact hole. A polycrystalline silicon layer is formed over the top to provide the lower electrode of a capacitor. Accordingly, the polycrystalline layer is separated from the impurity doped region thereby preventing current leakage.

REFERENCES:
patent: 4521794 (1985-06-01), Murase et al.
patent: 4725877 (1988-02-01), Brasen et al.
patent: 4754313 (1988-06-01), Takemae et al.
patent: 5073810 (1991-12-01), Owada

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