Method for manufacturing a plate-shaped workpiece

Details Method for manufacturing a plate-shaped workpiece Method for manufacturing a plate-shaped workpiece

2004-04-30

2008-11-11

Chen, Bret (Department: 1792)

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

C427S576000, C427S585000, C427S587000

Reexamination Certificate

active

07449220

ABSTRACT:
A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency potential with a varying distribution along the face. The other electrode face is metallic. Reactive gas is introduced into the process volume through an aperture pattern. The dielectric substrate, before treatment, is at least regionally coated with a layer material to whose specific resistanceapplies: 10−5Ωcm≦≦10−1Ωcm, and to the resulting surface resistance RSof the layer applies: 0<RS≦104Ω. Subsequently, the coated substrate is positioned on the metallic electrode face and is etched or coated reactively under plasma enhancement in the plasma process volume.

REFERENCES:
patent: 5292394 (1994-03-01), Cord et al.
patent: 6160345 (2000-12-01), Tanaka et al.
patent: 6228438 (2001-05-01), Schmitt
patent: 6502530 (2003-01-01), Turlot et al.
patent: 6631692 (2003-10-01), Matsuki et al.
patent: 6703080 (2004-03-01), Reyzelman et al.
patent: 2003/0089314 (2003-05-01), Matsuki et al.
patent: 0 382 632 (1990-02-01), None
patent: 1 070 767 (2000-01-01), None
PCT/CH2005/000150, Unaxis Balzers . . . , Mar. 4, 2005.

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