Method for manufacturing a microlens substrate and method...

Details Method for manufacturing a microlens substrate and method... Method for manufacturing a microlens substrate and method...

2006-08-08

2006-08-08

Norton, Nadine (Department: 1765)

Etching a substrate: processes

Forming or treating optical article

C216S026000

Reexamination Certificate

active

07087180

ABSTRACT:
Disclosed herein is a method for manufacturing a microlens substrate which is excellent in chemical resistance and light fastness to intense light irradiation, and is capable of forming a microlens substrate of a high accuracy of form. The method includes the steps of: forming a lens-shaped curve at a surface side of a transparent substrate; forming an inorganic material film on the transparent substrate so as to bury the curve therewith; and planarizing the surface of the inorganic material film to provide a microlens where the curve is buried with the inorganic material film.

REFERENCES:
patent: 5734190 (1998-03-01), Hawkins et al.
patent: 2001/0026346 (2001-10-01), Nagasako
patent: 2004/0082096 (2004-04-01), Yamamoto

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