Method for manufacturing a micro-actuator

Details Method for manufacturing a micro-actuator Method for manufacturing a micro-actuator

2006-08-01

2006-08-01

Norton, Nadine G. (Department: 1765)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C438S050000, C438S052000, C438S053000, C359S201100, C359S202100, C359S223100, C359S224200, C361S283100

Reexamination Certificate

active

07083737

ABSTRACT:
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.

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Examination Report issued by the European Patent Office on Jun. 15, 2004 in corresponding application.
P.F. Indermuehle et al.; Design and Fabrication of an Overhanging xy-microactuator with integrated Tip for Scanning Surface Profiling; May 1, 1994; pp. 346-350; vol. A43, No. 1/3; Sensors and Actuators A, Elsevier Sequoia S.A., Lausanne, Switzerland.

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