Method for manufacturing a liquid crystal display device

Details Method for manufacturing a liquid crystal display device Method for manufacturing a liquid crystal display device

2006-08-01

2006-08-01

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S318000, C430S321000, C430S396000

Reexamination Certificate

active

07083900

ABSTRACT:
A method for manufacturing an LCD including at least two stacked thin layers in which the upper thin film smoothly and completely covers the lower thin film includes the steps of coating a photo-resist on a patterned layer, patterning the photo-resist by exposing and developing the photo-resist with a mask which has lines and spaces in which a distance between the lines is smaller than a resolution of an exposure system used and etching the metal layer using the patterned photo-resist as a mask. The resulting photo-resist pattern has a comb shape.

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