Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
1999-07-02
2001-02-20
Bowers, Charles (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S151000, C438S152000, C438S153000, C257S292000, C257S293000
Reexamination Certificate
active
06190951
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a manufacturing method for an active-matrix liquid crystal display apparatus (hereinafter, referred to as “TFT-LCD”) wherein a TFT (thin film transistor) is used as a switching element. More specifically, the present invention concerns a method for manufacturing a TFT array substrate which is less susceptible to point defects and line defects, and its objective is to improve the display characteristics and productivity of a TFT-LCD.
A TFT-LCD in which an active-matrix substrate, a color filter substrate also serving as an opposing electrode and liquid crystal are assembled on a glass substrate has been put into the market as a flat display that meets demands for a flat image-display apparatuses, and has been expected to develop a big market as a display for notebook personal computers as well as for office automation monitors.
In a TFT, in most cases, amorphous silicon which can be deposited on a large area at comparatively low temperatures is used as a semiconductor layer.
For example,
FIG. 4
shows a cross-sectional view of an essential portion of a TFT array substrate obtained by a conventional manufacturing method.
A first conductive thin film is formed on a glass substrate
51
. Next, the first conductive thin film is patterned in a first photolithography process so that a gate electrode
52
and an auxiliary capacitive electrode are formed. Then, a gate insulating film
53
, an a-Si:H (amorphous silicon to which hydrogen atoms are added) semiconductor layer
54
, an n+a-Si:H ohmic contact layer
55
are deposited by the plasma CVD method.
Next, the semiconductor layer and the ohmic contact layer are patterned in a second photolithography process so that portions to form channels are left. Then, a second conductive thin film is formed. Moreover, the second conductive thin film is patterned in a third photolithography process so that a pixel electrode
56
is formed. Next, contact holes used for forming terminal sections are patterned in a fourth photolithography process. Then, a third conductive thin film such as an Al—Si alloy is formed. Next, the third conductive thin film is patterned in a fifth photolithography process so that a source electrode
57
and a drain electrode
58
are formed, and using the source electrode
57
and the drain electrode
58
as masks, the ohmic contact layer
55
is patterned so as to form a thin film transistor.
Then, a passivation film
59
is formed by a method such as the plasma CVD method, and contact holes used to connect TCPs are patterned in a sixth photolithography process, thereby completing the formation of a thin film transistor array substrate.
Upon forming the gate electrode
52
and the auxiliary capacitive electrode during the process for manufacturing the TFT, a material such as Cr, which has high chemical resistance and a high fusing point, is often used as the material for the gate electrode
52
. In order to pattern Cr, a wet etching process is carried out by using an etchant containing cerium ammonium nitrate.
After the gate electrode
52
has been patterned, a gate insulating film
53
is formed, or a gate insulating film
53
, an a-Si:H (amorphous silicon to which hydrogen atoms are added) semiconductor layer
54
, and an n+a-Si:H ohmic contact layer
55
are continuously formed by the plasma CVD method, and the semiconductor layer
54
and the ohmic contact layer
55
are shaped into an island pattern. Then, a pixel electrode
56
is formed, and after contact holes used for forming contact sections have been formed, a conductive thin film, such as an Al—Si film, is formed so as to form a source electrode
57
and a drain electrode
58
. At this time, since the adhesive strength between the glass substrate
51
and the gate insulating film
53
is weak, peeling off of the film tends to occur and cause disconnection of the source wiring, etc., during post processes, resulting in degradation in the display.
Here, Japanese Unexamined Patent Publication No. 203982/1993 discloses a method in which, in order to form a thin film transistor having high reliability, after washing a glass substrate by a hydrofluoric acid solution, an insulating film is formed thereon; however, in order to prevent film rising due to the insufficient adhesive strength, after washing a glass substrate by a hydrofluoric acid solution in the same manner, a gate electrode is formed, and in the case when, after formation of the gate electrode, a gate insulating film is formed without carrying out washing by a hydrofluoric solution, it is not possible to solve the above-mentioned problem.
Moreover, Japanese Unexamined Patent Publication No. 217919/1989 discloses a method in which the adhesive strength between the glass substrate and the gate insulating film is increased in the case when, after a gate electrode has been patterned by dry etching using fluorine-type gas, a gate insulating film is formed; however, the problem with this method is that, in the case of a high concentration of the hydrofluoric acid, or in the case of a long processing time, the surface of the glass substrate becomes so rough that the adhesive strength is lowered conversely.
SUMMARY OF THE INVENTION
The objective of the present invention is to provide a manufacturing method for improved TFTs which can solve the above-mentioned problem and which, when used as a driving element for a liquid crystal display, can minimize defects in the liquid crystal display and produce the liquid crystal display with high yield.
In order to achieve the above-mentioned objective, the method for manufacturing a liquid crystal display apparatus of the present invention, which is a manufacturing method of a liquid crystal display apparatus in which a thin film transistor formed by successively depositing on (
1
) a glass substrate a gate electrode (
2
), a gate insulating film (
3
) an active layer made of amorphous silicon, a source electrode and a drain electrode is used for driving liquid crystal, said method comprising steps of: forming the gate electrode (
2
) by patterning a gate metal layer coating the glass substrate (
1
) by a wet etching process using an etchant containing cerium ammonium nitrate; removing an etching reaction product adhering on the substrate (
1
) by washing it with a hydrofluoric acid solution; and forming the gate insulating film (
3
).
In other words, in the manufacturing method of TFTs of the present invention, after the gate electrode (
2
) has been patterned, prior to formation of the gate insulating film (
3
), at least either a buffered hydrofluoric acid process or a dilute hydrofluoric acid process is carried out so that a residual product on the glass substrate (
1
) and the gate electrode (
2
) is removed and so that the glass substrate
1
is slightly roughened; thus, the adhesive strength between the glass substrate
1
and the gate insulating film (
3
) is increased so that a thin-film transistor array substrate free from defects due to peeling off of the film can be produced with high yield.
REFERENCES:
patent: 5187604 (1993-02-01), Taniguchi et al.
patent: 5202575 (1993-04-01), Sakai
patent: 5216491 (1993-06-01), Yamamoto et al.
patent: 5360744 (1994-11-01), Shimuzu
patent: 5510918 (1996-04-01), Matsunaga et al.
patent: 5724107 (1998-03-01), Nishikawa et al.
patent: 5905553 (1999-03-01), Matsukawa et al.
Fujiwara Masakuni
Nakahori Tadaki
Yasuda Harumi
Advanced Display Inc.
Bowers Charles
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Schillinger Laura M
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