Method for manufacturing a force sensor

Details Method for manufacturing a force sensor Method for manufacturing a force sensor

1996-06-05

1998-09-08

Trinh, Michael

Fishing, trapping, and vermin destroying

437901, 437921, 148DIG159, H01L 2177

Patent

active

058044574

ABSTRACT:
In a force sensor, a resonator is mounted by means of a dielectric layer on a bending element. Deformation of the bending element changes the resonant frequency of the resonator.

REFERENCES:
patent: 5316619 (1994-05-01), Mastrangelo
patent: 5438875 (1995-08-01), Fung et al.
patent: 5508231 (1996-04-01), Ball et al.
patent: 5543349 (1996-08-01), Kurtz et al.

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