Fishing – trapping – and vermin destroying
Patent
1993-07-22
1995-03-14
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 51, 437235, 437983, 148DIG118, H01L 21265
Patent
active
053977190
ABSTRACT:
The present invention relates to an improved method of manufacturing pads of a display panel. Al or Al alloy is deposited and patterned on a glass substrate for forming a plurality of gate electrodes and lines. Then a plurality of pads are formed with Ta or Ti, which is capable of forming an anodic oxide thereof; each pad extending over an edge of each of the respective gate lines to provide an electrical coupling therebetween. Thereafter, the entire surface of the pads, gate electrodes and lines is subjected to an anodic oxidation under a high anodization voltage. Anodic oxide layers on the pads are then etched away together with a silicon nitride layer during a subsequent pad opening processing step. Consequently, in accordance with the invention, a photoresist masking process for the selective anodic oxidation of Al gate lines and electrodes is eliminated.
REFERENCES:
patent: 4871234 (1989-10-01), Suzuki
patent: 4997788 (1991-03-01), Martens et al.
patent: 5070379 (1991-12-01), Nomoto et al.
patent: 5086009 (1992-02-01), Sangouard
Bae Yong-Kuk
Jang In-sik
Kim Dong-Kyu
Kim Sang-soo
Donohoe Charles R.
Hearn Brian E.
Samsung Electronics Co,. Ltd.
Trinh Michael
Westerlund, Jr. Robert
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