Method for manufacturing a color filter for deformable mirror de

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

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430 4, 430312, 430319, 359855, 359884, G02B 508

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052408183

ABSTRACT:
A deformable mirror device comprises a plurality of groups of colored mirrors responsive to electronic signals. Each group of mirrors is coated with a mixture of resist and dye thereby reflecting specified wavelengths of visible light. A process for manufacturing such a color deformable mirror device ("DMD") includes forming a layer of material on the DMD comprising a resist and a dye and selectively removing portions of the layer of material from the DMD.

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English language abstract of JP 02-277019, "Color Separation Type Optical Scanner", Miyazaki et al., Nov. 1990.
Uematsu "Wafer Processes of Color Filter Arrays for Imagers", '86 International Conference in China, 380-382, Oct. 1986.

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