Fishing – trapping – and vermin destroying
Patent
1994-11-23
1995-08-22
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437 47, 437 52, 437919, 148DIG14, H01L 218242
Patent
active
054439930
ABSTRACT:
A method for manufacturing a capacitor for a semiconductor device, which includes the steps of forming a first conductive layer on a semiconductor substrate, forming a first pattern by patterning the first conductive layer, sequentially forming a second conductive layer and a first material layer on the entire surface of the resultant structure, forming a spacer on the sidewall of the second conductive layer by anisotropic-etching the first material layer, forming a second pattern by partially etching the second conductive layer and the first pattern, using the spacer as an etching mask, forming a third conductive layer on the entire surface of the resultant structure, forming a cylindrical storage electrode by anisotropic-etching the third conductive layer, and removing the spacer.
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Lee Jong-Jin
Park Won-mo
Donohoe Charles R.
Hearn Brian E.
Nguyen Tuan
Samsung Electronics Co,. Ltd.
Westerlund Robert A.
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