Method for making thin film transistor

Details Method for making thin film transistor Method for making thin film transistor

2007-10-11

2010-11-09

Menz, Laura M (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S151000, C438S158000

Reexamination Certificate

active

07829398

ABSTRACT:
A method for making a thin film transistor (TFT) is provided. A mask is first formed on the backside of a substrate, and is used to fabricate a gate, source, and drain of the transistor by backside exposure, such that the source and drain can be self-aligned with the gate pattern. In this way, an alignment shift due to expansion or contraction after performing a high temperature process on an insulating layer can be avoided. Further, since the backside mask previously formed on the substrate can be shifted with the expansion or contraction of the substrate, the process is simplified. Moreover, the source/drain can be accurately aligned with the gate, so that parasitic capacitance can be reduced and flickering of the panel can be avoided.

REFERENCES:
patent: 6566172 (2003-05-01), Jackson et al.
patent: 6664032 (2003-12-01), Tanaka
patent: 7384729 (2008-06-01), Fu et al.
patent: 2004/0232495 (2004-11-01), Saito et al.
patent: 2005/0148123 (2005-07-01), Mao-Tsum
patent: 2006/0086979 (2006-04-01), Kim et al.
patent: 2006/0275711 (2006-12-01), Fu et al.
patent: 2007/0059868 (2007-03-01), Huang et al.
patent: 2007/0146426 (2007-06-01), Nelson et al.
patent: 2007/0269750 (2007-11-01), Irving et al.
patent: 2008/0093605 (2008-04-01), Kornegay et al.
patent: 2008/0099843 (2008-05-01), Wang et al.
patent: 2008/0102567 (2008-05-01), Wang et al.
patent: 2009/0166612 (2009-07-01), Cain et al.

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