Method for making tapered microminiature silicon structures

Details Method for making tapered microminiature silicon structures Method for making tapered microminiature silicon structures

1991-10-08

1993-04-13

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156651, 156654, 1566591, 156662, 445 24, 313366, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

052019926

ABSTRACT:
Tapered silicon structures, of interest for use, e.g., in atomic force microscopes, in field-emission devices, and in solid state devices are made using silicon processing technology. Resulting tapered structures have, at their tip, a radius of curvature of 10 nanometers or less. Such preferred silicon structures are particularly suited as electron emitters in display devices.

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