Method for making shielded capacitor structure

Details Method for making shielded capacitor structure Method for making shielded capacitor structure

2005-11-29

2005-11-29

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S253000, C257S306000

Reexamination Certificate

active

06969680

ABSTRACT:
A method and apparatus if provided for shielding a capacitor structure formed in a semiconductor device. In a capacitor formed in an integrated circuit, one or more shields are disposed around layers of conductive strips to shield the capacitor. The shields confine the electric fields between the limits of the shields.

REFERENCES:
patent: 4470096 (1984-09-01), Guertin
patent: 6737698 (2004-05-01), Paul et al.

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