Method for making seed crystals for single-crystal semiconductor

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156DIG102, C30B 1322

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active

045855129

ABSTRACT:
Seed crystals are made in a region of a polycrystalline layer on a substrate using a beam of electrons. The beam is used to melt the region, which is then solidified from one end to the other in a first direction and outwardly toward the edges in a second direction normal to the first direction. Several different techniques can be used to promote solidification in the proper directions. The region can be heated non-uniformly and then cooled to maintain the desired temperature distribution. The region can also be cooled non-uniformly to provide the desired temperature distribution. The region can be heated non-uniformly using apparatus that controls the energy deposited in the region by the electron beam.

REFERENCES:
patent: 4282186 (1983-05-01), Denholm et al.
patent: 4330363 (1982-05-01), Biegesen et al.
patent: 4388145 (1983-06-01), Hawkins et al.

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