Method for making probes for atomic force microscopy

Details Method for making probes for atomic force microscopy Method for making probes for atomic force microscopy

2007-07-10

2007-07-10

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S825000, C029S829000, C029S846000, C029S874000, C073S105000, C257S253000, C257S254000

Reexamination Certificate

active

11015715

ABSTRACT:
A method for producing probes for atomic force microscopy comprises producing, on a surface of one side of a semiconductor substrate, one or more moulds for the production of one or more probe tips. One or more probe configurations and at least one set of a probe tip and a cantilever are also produced on the side of the substrate, wherein each configuration comprises a contact region for attachment of a holder. The surface area of each contact region is smaller in size than the surface area of the holder. The method further includes attaching one or more holders to the contact region(s), and releasing the probe configuration and the holder from the substrate by under-etching the probe configuration from the side of the substrate on which the probe configuration is produced.

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