Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1990-12-06
1992-08-18
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20412955, 20412975, 20412995, C25F 312, C25F 330
Patent
active
051396246
ABSTRACT:
A method for making a self-supporting porous semiconductor membrane characterized by the electrolytic etching of a surface of a semiconductor wafer until at least one pore propagates fully through the wafer. The wafer forms the anode of the cell and a relatively inert material, such as platinum, forms the cathode of the cell. The electrolyte is a mixture of HF, H.sub.2 O and possibly a wetting agent. One side of the semiconductor wafer is shielded from the electrolyte and pores are allowed to propagate through the body of the wafer towards the shielded side. In one embodiment of the invention the pores are allowed to propagate fully through the body of the wafer and in another embodiment the pores are partially propagated through the wafer and then material is removed from the shielded side of the wafer to expose the pores. Also disclosed are asymmetrical filters and molecular sieves, an electronic component utilizing a porous semiconductor membrane and a micromechanical device using a porous semiconductor membrane.
REFERENCES:
patent: 4069121 (1978-01-01), Baud et al.
Macaulay John M.
Searson Peter C.
Hickman Paul
SRI - International
Valentine Donald R.
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