Method of surface treatment

Details Method of surface treatment Method of surface treatment

1988-10-20

1992-04-28

Beck, Shrive

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156647, 156614, 4272552, 4272553, 427 531, 427 38, B05D 306, C23C 1600, C30B 2500, B44C 122

Patent

active

051085437

ABSTRACT:
Surface treatment is applied to a substrate by supplying thereto excited molecules in which the vibrational energy level is excited. SF.sub.6, O.sub.2, N.sub.2, etc., are used as the excited molecules and supplied to the substrate as beams. This method is particularly suitable for the surface treatment in the production of semiconductor devices.

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The Technology and Physics of Molecular Beam Epitaxy, Ed. Parker Plenum Press, N.Y. 1985.

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