Method for making planar optical waveguide comprising thin metal

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

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148 63, 427162, 427163, G02B 514, B05D 306, B05D 302

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043438903

ABSTRACT:
Enhanced optical coupling by phase evanescent fields is achieved by covering the planar layer of a waveguide with a thin metal oxide film incorporating a relief phase grating. The grating is originally formed in a metallic film covering the planar layer, which metallic film is converted to a metal oxide film by heating in an oxygen-containing atmosphere.

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patent: 4082425 (1978-04-01), Miller
patent: 4102560 (1978-07-01), Miller
patent: 4156206 (1979-05-01), Comerford et al.
patent: 4227769 (1980-10-01), Phillips et al.

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