Method for making mechanical and micro-electromechanical devices

Details Method for making mechanical and micro-electromechanical devices Method for making mechanical and micro-electromechanical devices

1993-10-25

1995-05-09

Chaudhuri, Olik

Etching a substrate: processes

Etching of semiconductor material to produce an article...

437228, 437229, 216 48, 216 17, B44C 122

Patent

active

054136687

ABSTRACT:
Methods for making mechanical and micro-electromechanical devices (a) forming a mold having a base and metallic walls defining a molding space therebetween, the base being exposed between the metallic walls and either being capable of or having a nucleating upper surface capable of nucleating the deposition of a structural material which does not nucleate on or adhere to the metallic walls at conditions of deposition; (b) depositing a structural material onto either the nucleating upper surface or base and filling to a predetermined height to form a strong solid body; and (c) removing the metallic walls, leaving free-standing, solid body walls of structural material attached to the base; another embodiment of the method may include step (a) and steps (b) filling the molding space with a diamond-nucleating material; (c) consolidating the diamond-nucleating material so as to form a strong solid body; and (d) removing the metallic walls, and thereby freeing the solid body, by dissolving the metallic walls with an agent, normally a liquid.

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