Method for making Josephson junctions with contamination-free in

Details Method for making Josephson junctions with contamination-free in Method for making Josephson junctions with contamination-free in

1982-09-30

1984-03-27

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29599, 156652, 156655, 204192E, 204192S, 357 5, 427 62, 427 86, H01L 3924

Patent

active

044392699

ABSTRACT:
A method of fabricating Josephson junction integrated circuits in which the active layers are deposited within an ultra-high vacuum system during a single pumpdown of the system. Subsequent anisotropic etching defines the devices by etching away complete layers in some areas so as to isolate the Josephson junction device.

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