Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2009-06-01
2011-12-20
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S255000, C438S260000, C438S398000, C438S964000, C257S534000, C257S739000, C257SE21012, C257SE21013
Reexamination Certificate
active
08080474
ABSTRACT:
The present invention provides a method for making an electrode. Firstly, a conducting substrate is provided. Secondly, a plurality of nano-sized structures is formed on the conducting substrate by a nano-imprinting method. Thirdly, a coating is formed on the nano-sized structures. The nano-sized structures are configured for increasing specific surface area of the electrode.
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Chew Raymond J.
Hon Hai Precision Industry Co. Ltd.
Parker John M
Smith Matthew
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