Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-04-11
2006-04-11
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S672000, C438S673000, C438S638000
Reexamination Certificate
active
07026239
ABSTRACT:
A method of manufacturing an anisotropic conductive polymer film on a semiconductor wafer including on one surface a layer of passivation in which at least one opening is made to allow access to a contact pad. The method can be applied to creating components (chips, integrated circuits) with high-density interconnections.
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patent: 99/05717 (1999-02-01), None
Jean-Charles Souriau, et al., “Electrical Conductive Film for Flip-Chip Interconnection Based on Z-axis Conductors”, Electronic Components and Technology Conference, pp. 1151-1153 2002.
Brun Jean
Renard Pierre
Souriau Jean-Charles
Commissariat a l''Energie Atomique
Le Dung A.
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