Method for making a semiconductor laser

Details Method for making a semiconductor laser Method for making a semiconductor laser

1992-09-10

1994-05-24

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437107, 437126, 437133, 437129, 372 43, 372 44, 372 45, 372 46, H01L 2120

Patent

active

053148380

ABSTRACT:
Disclosed is a method for manufacturing a vertical cavity, surface-emitting laser. The method includes growing a distributed Bragg reflector having at least 10 layers of alternating composition on a gallium arsenide substrate. The growth surface of the substrate is tilted by an angle of 1.degree.-7.degree. from the orientation of a (100) surface toward the orientation of a (111)A surface. This results in improved reflectivity of the DBR.

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