Method for making a pressure sensor

Details Method for making a pressure sensor Method for making a pressure sensor

2005-05-27

2008-07-29

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025350, C029S594000, C029S609100, C073S706000, C073S754000, C073S715000, C257S301000, C257S522000, C257S544000, C257S751000, C310S344000, C310S348000, C439S076100, C439S936000

Reexamination Certificate

active

07404247

ABSTRACT:
A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of, after the forming or locating step, etching a cavity in the substrate below the pressure sensing component to define a diaphragm above the cavity with the pressure sensing component located on the diaphragm. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the diaphragm.

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Statement by Applicant with Attachment A.

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