Method for making a capacitor having an electrode surface with a

Details Method for making a capacitor having an electrode surface with a Method for making a capacitor having an electrode surface with a

1992-11-13

1994-09-27

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 60, 437919, H01L 2170, H01L 2700

Patent

active

053507070

ABSTRACT:
The present invention provides a semiconductor device having a capacitor that is formed through: a first step of forming a polysilicon layer having a rough surface after a nonconductive layer is applied to a base substrate; a second step of etching back away the polysilicon layer to expose the nonconductive layer and thus remaining islandlike polysilicon layers; a third step of etching the nonconductive layer, using the remained polysilicon layers as an etching mask; a fourth step of etching the base substrate of the capacitor, using the nonconductive layer as a mask; a fifth step of forming a pattern of the base substrate of the capacitor after the removal of the remained nonconductive layer; a sixth step of forming an upper substrate of the capacitor after the formation of a dielectric film of the capacitor. According to this invention, the surface area of the capacitor electrode is remarkably enhanced such that the integrity of DRAMs is more improved.

REFERENCES:
patent: 5149676 (1992-09-01), Kim
patent: 5204280 (1993-04-01), Dhong et al.
patent: 5223448 (1993-06-01), Su
patent: 5227322 (1993-07-01), Ko et al.
patent: 5256587 (1993-10-01), Jun et al.
Fabrication of Storage Capacitance-Enhanced Capacitors with a Rough Electrode Hayashide et al., Extended Abst. 22nd. Int'l Conf. Solid State Devices and Mat'l, Japan J. Appl. Phys., Tokyo, Japan (1990), pp. 869-872.

Affiliated with

Also associated with

Rating

Method for making a capacitor having an electrode surface with a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for making a capacitor having an electrode surface with a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for making a capacitor having an electrode surface with a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1265348